Sub-Fab Management from One Source from Busch Vacuum Solutions

Busch’s vacuum experts offer 24h service in the medium and high vacuum range, also for third-party products. This on-site service for demanding processes in the semiconductor industry enables customers to concentrate completely on their processes: the production of state-of-the-art microchips.

Critical sub-fab systems are monitored and predictively maintained by Busch. This sub-fab management minimizes production downtime, enables energy-efficient operation and energy and cost savings. Continuous monitoring can extend maintenance intervals and the entire product life cycle. All Busch on-site service teams are certified to ISO9001:2016, ISO14001:2016 and ISO45001:2018 standards.

Selecting the right vacuum and abatement systems can be crucial to energy-efficient and sustainable processes. Busch Vacuum Solutions is one of the world’s biggest manufacturers of vacuum pumps, blowers and compressors. The extensive product portfolio covers vacuum and overpressure applications for all industrial sectors.

Many years of experience and expertise in the implementation of vacuum systems enable the development of customer-specific complete solutions. Continuous advancements ensure that Busch vacuum pumps and systems are always state-of-the-art and used millions of times worldwide.

Visit Busch Vacuum Solutions at Semicon Europe from November 15 – 18 in Munich. Exchange ideas with our experienced vacuum experts at our joint booth of Silicon Saxony in Hall C1, Stand Number 219.